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and certification procedure for a bonded wafer reference sample composed of two wafers
instrument configuration
SEMI E89等で網羅しており，統計的な考察を議論することは行わない。
SEMI C90-00-0725 (complete rewrite)
C05100 - SEMI C51 - Specification for Xylenes Revision:SEMI C51-0699 - Superseded and certification procedure for aThe purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard. Test methods have been shown to give statistically valid results. The scope of this Document is a grade of xylene used in the semiconductor industry. This material is a mixture of ortho, meta, and para isomers and ethyl benzene. Xylene (o , m , and p isomers) 99. 0% min and Ethyl benzene