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D03800 - SEMI D38 - LCD用マスクの有効範囲のガイド Revision:SEMI D38-0211 - Superseded full wafers are basically used

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Description

full wafers are basically used

Purpose of this Standard is not to unify substrate size for thin film photovoltaic applications but to provide a range of substrate sizes for equipment applicable to 5th generation substrate which has large population

この作業方法では,次の事項を取り扱う。

This Standard describes procedures for measuring the mechanical

D03800 - SEMI D38 - LCD用マスクの有効範囲のガイド Revision:SEMI D38-0211 - Superseded full wafers are basically usedglobal Flat Panel Display Mask Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org20043 LCD Referenced SEMI Standards SEMI D6 Specification for Edge Length and Thickness for Liquid Crystal Display (LCD) Mask Substrates SEMI P1 Specification for Hard Surface Photomask Substrates

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